This dataset is related to the air-cladding laser diodes (LDs) fabricated in the MBE Laboratory of the Institute of High Pressure Physics PAS.
Data are related to the publication titled "Air-cladding Blue Laser Diodes"
authored by Marta Sawicka1, Mateusz Hajdel1, Oliwia Gołyga1, Henryk Turski1, Mikołaj Chlipała1, Anna Feduniewicz1, Szymon Stańczyk1, Czesław Skierbiszewski1, Cedric Corley-Wiciak2, Carsten Richter3, and Grzegorz Muziol1
- Institute of High Pressure Physics Polish Academy of Sciences, Sokołowska 29/37, 01-142 Warsaw, Poland
- European Synchrotron Radiation Facility, X-ray Imaging and Microscopy Group, 71 Avenue des Martyrs, CS 40220, 38043 Grenoble Cedex 9, France
- Leibniz -Institut für Kristallzüchtung, Max-Born-Straße 2, D-12489 Berlin, Germany
The files are:
1. optical microscope images of the wafer with etched air-cladding and processed devices on-wafer. zipped jpg and png files.
2. SEM images of membrane air clad LDs - zipped - in TIF format
3. SEM images of wing air clad LDs - zipped - in TIF format
4. AFM and OM images of the membranes that contain the datafiles with topography information of two measured spots - Ga-side is on the wafer after detachment of the LD while N-side is the membrane backside. The files are readable by open-source software e.g. Gwyddion. Moreover the zipped folder contained also the processed images, and locations on the Ga-side and N-side measurement on the membrane backside.
The information about the fabrication steps of the investigated laser diodes is given in readme file.
(2026)