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Figure1.txt
Plain Text - 140.7 KB - Jan 31, 2025 - 0 DownloadsMD5: 2a28393236ac96d969c8927268905193
License: CC BY - Creative Commons Attribution 4.0
Cross-sectional high-resolution transmission electron microscopy pictures for samples a) Al0.02, b) Al0.04, c) Al0.07, d) Al0.13. Carbon (C) and platinum (Pt) caps were deposited in lamella preparation process. Atomic fraction profiles derived as integrated signal from energy-dispersive X-ray spectroscopy (EDX) maps for samples e) Al0.02, f) Al0.04, g) Al0.07 h) Al0.13. The distance on horizontal axis refers to map coordinate across the sample. Straight lines visualize trend for Al2O3 background signal. Secondary ion mass spectrometry (SIMS) results for aluminum ion for samples i) Al0.02, j) Al0.04, k) Al0.07, l) Al0.13. The distance on horizontal axis refers to the distance from sample interface. Orange rectangle in e)-l) visualizes signal corresponding to BAlN layer. Al values denote to aluminum composition extracted from the measurement and δ is its uncertainty. Columns: 1, 3, 5, 7, 9, 11, 13, 15 are the distance in nm, columns 2, 4, 6, 8 are atomic fraction in % obtained with STEM-EDX, columns: 10, 12, 14, 16 are atomic fraction in % obtained with SIMS for the following samples. | |
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Figure2.txt
Plain Text - 47.4 KB - Jan 31, 2025 - 0 DownloadsMD5: d824a7fb51f51a99de0b8e8ea9b4626a
License: CC BY - Creative Commons Attribution 4.0
X-ray diffraction 2θ\ω scans of the studied samples: a) scan in a wide 2θ range (semi-log scale), b) zoom on the peak related to hBAlN and c) zoom on the peak related to AlN. Columns 1, 3, 5, 7 are 2Theta values in deg and columns 2, 4, 6, 8 are XRD intensity in cps for the following samples. | |
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Figure3.txt
Plain Text - 983.5 KB - Jan 31, 2025 - 0 DownloadsMD5: bec4320d9339bc769562294743982af8
License: CC BY - Creative Commons Attribution 4.0
Fourier-transform infrared reflectance spectrum for the Al0.02 sample with the lowest TMAl flow (black dots). The red line is the fitted curve. The inset shows a zoom on the peak of the E1u vibrational mode, which is strong evidence for a sp2 crystal structure for all hBAlN samples. The black dots represent the experimental data and the lines are the fitted curves: red for Al0.02, blue for Al0.04, green for Al0.07, purple for Al0.13. Columns: 1, 3, 5, 7, 9, 11, 13, 15 are energy in cm-1, columns 2, 6, 10, 14 are experimental reflectivity values for the following samples and columns: 4, 8, 12, 16 represent values of the fitted curves. | |