With the NCN reporting period nearing, we would appreciate it if you could send your data for review with sufficient lead time. Unfortunately, we will not be able to guarantee priority processing for all datasets received at once.
If you don't see your institution, add your dataset to the main dataverse named "RepOD".
Select the dataverse to which you want to add the new dataset:
You need to Sign In/Sign Up to add a dataset.
Share this dataset on your favorite social media networks.
Urbański, Paweł, 2026, "Maintaining a vacuum in MEMS", https://doi.org/10.18150/ZWSCU2, RepOD, V1
Learn about Data Citation Standards.
These data contain experimental measurements and diagnostics related to vacuum dynamics within hermetically sealed MEMS (microelectromechanical systems) structures that incorporate electron-emission components. The dataset includes pressure measurements, residual gas composition spectra, and operational parameters obtained during in situ evaluation of vacuum conditions under electron beam exposure. The focus of the study is on the mechanisms of vacuum degradation—including electron-stimulated desorption (ESD) from silicon and borosilicate glass surfaces—and on the performance of an integrated ion-sorption pump (Sensor–Analyzer–Pump, SAP) implemented within the sealed MEMS device for maintaining high vacuum.
MEMS, high vacuum, ion-sorption pump
Paweł Urbański, Tomasz Grzebyk, 2026, Sustaining high vacuum in sealed MEMS devices: role of ion-sorption pump and electron-stimulated desorption, Measurement, 266, 120496, 1-8 https://doi.org/10.1016/j.measurement.2026.120496 doi: 10.1016/j.measurement.2026.120496
CC0 Creative Commons Zero 1.0
Please select a file or files to be deleted.
The file(s) will be deleted after you click on the Delete button.
Files will not be removed from previously published versions of the dataset.
Please select a file or files to be edited.
For selected file(s) set a license to
Please select a file or files to be downloaded.
Please select a file or files for access request.
Please select restricted file(s) to be unrestricted.
You need to Log In/Sign Up to request access to this file.
Please confirm and/or complete the information needed below in order to continue.
Asterisks indicate required fields
Access to file(s) subject to additional consent under following conditions:
The restricted file(s) selected may not be downloaded because you have not been granted access.
Click Continue to download the files you have access to download.
Are you sure you want to delete this dataset and all of its files? You cannot undelete this dataset.
Are you sure you want to lift the embargo?
Once you lift the embargo, you will not be able to set it again.
Are you sure you want to delete this draft version? Files will be reverted to the most recently published version. You cannot undelete this draft.
Use a Anonymized Private URL to allow those without Dataverse accounts to access your dataset. For more information about the Private URL feature, please refer to the User Guide.
Private URL has not been created.
"WARNING. This dataset has at least one published version. Those who have access to the Anonymized Private URL for this dataset may be able to use its accessible metadata to look up the full, not anonymized version of this dataset.
Are you sure you want to disable the Private URL? If you have shared the Private URL with others they will no longer be able to use it to access your dataset.
Use a Private URL to allow those without Dataverse accounts to access your dataset. For more information about the Private URL feature, please refer to the User Guide.
You will not be able to make changes to this dataset while it is in review.
This dataset cannot be published until Wrocław University of Science and Technology is published. Would you like to publish both right now?
Once you publish this dataset it must remain published.
Are you sure you want to republish this dataset?
Select if this is a minor or major version update.
This dataset cannot be published until Wrocław University of Science and Technology is published by its administrator.
This dataset cannot be published until Wrocław University of Science and Technology and RepOD are published.
Are you sure you want to deaccession? The selected version(s) will no longer be viewable by the public.
Please fill this out to prove you are not a robot.
